DocumentCode
599872
Title
An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height
Author
Putrino, G. ; Martyniuk, M. ; Keating, Ana ; Faraone, L. ; Dell, J.M.
Author_Institution
Sch. of Electr., Electron. & Comput. Eng., Univ. of Western Australia, Crawley, WA, Australia
fYear
2012
fDate
12-14 Dec. 2012
Firstpage
115
Lastpage
116
Abstract
We present an experimental demonstration of an integrated technique designed to measure the height position of a micro-cantilever with extremely high precision. Our experimental results show that changing the beam height by 200 nm can result in an up to 40 dB change in optical power transmitted through an underlying optical waveguide.
Keywords
camshafts; cantilevers; diffraction gratings; height measurement; micromechanical devices; optical waveguides; position measurement; MEMS cantilever beam height; grating-based technique; height position measurement; integrated technique; microcantilever; optical power transmission; optical waveguide; optically resonant technique; sensitive detection; Gratings; Measurement by laser beam; Optical device fabrication; Optical reflection; Optical sensors; Optical variables measurement; Optical waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on
Conference_Location
Melbourne, VIC
ISSN
1097-2137
Print_ISBN
978-1-4673-3047-3
Type
conf
DOI
10.1109/COMMAD.2012.6472387
Filename
6472387
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