Title :
An optically resonant, grating-based technique for the sensitive detection of MEMS cantilever beam height
Author :
Putrino, G. ; Martyniuk, M. ; Keating, Ana ; Faraone, L. ; Dell, J.M.
Author_Institution :
Sch. of Electr., Electron. & Comput. Eng., Univ. of Western Australia, Crawley, WA, Australia
Abstract :
We present an experimental demonstration of an integrated technique designed to measure the height position of a micro-cantilever with extremely high precision. Our experimental results show that changing the beam height by 200 nm can result in an up to 40 dB change in optical power transmitted through an underlying optical waveguide.
Keywords :
camshafts; cantilevers; diffraction gratings; height measurement; micromechanical devices; optical waveguides; position measurement; MEMS cantilever beam height; grating-based technique; height position measurement; integrated technique; microcantilever; optical power transmission; optical waveguide; optically resonant technique; sensitive detection; Gratings; Measurement by laser beam; Optical device fabrication; Optical reflection; Optical sensors; Optical variables measurement; Optical waveguides;
Conference_Titel :
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-1-4673-3047-3
DOI :
10.1109/COMMAD.2012.6472387
