• DocumentCode
    599876
  • Title

    Low-band gap nanoparticles embedded in high-K dielectrics

  • Author

    Nestler, T. ; Haas, S. ; Otto, R. ; Schneider, Fabian ; Hickey, S.G. ; Gabriel, Solari ; Himcinschi, C. ; Klemm, Volker ; Schreiber, Gabriel ; Heitmann, J.

  • Author_Institution
    Inst. fur Angewandte Phys., Tech. Univ. Bergakad. Freiberg, Freiberg, Germany
  • fYear
    2012
  • fDate
    12-14 Dec. 2012
  • Firstpage
    123
  • Lastpage
    124
  • Abstract
    In this paper our recent research on Ge and PbS nanoparticles embedded in ZrO2 will be reviewed. Ge nanoparticles have been deposited by rf-cosputtering of ZrGe2O2.9/ZrO2 superlattices and subsequent annealing. ZrO2 and the phase separated Ge crystallizes at 650°C into nanocrystalline layers. These layers show a luminescence signal at 2.5 eV, which is contributed to defect luminescence. PbS nanoparticles have been fabricated using wet chemical methods and embedded in the ZrO2 matrix by sol-gel deposition. In this case a luminescence signal at 1.3 μm has been detected after annealing at 100°C.
  • Keywords
    IV-VI semiconductors; annealing; crystallisation; elemental semiconductors; germanium; high-k dielectric thin films; lead compounds; nanofabrication; nanoparticles; phase separation; photoluminescence; semiconductor growth; sol-gel processing; sputter deposition; superlattices; zirconium compounds; Ge-ZrO2; PbS-ZrO2; annealing; chemical methods; crystallization; defect luminescence; high-k dielectrics; low-band gap nanoparticles; luminescence signal; nanocrystalline layers; phase separation; radiofrequency cosputtering; sol-gel deposition; superlattices; temperature 100 degC; temperature 650 degC; Annealing; Films; High K dielectric materials; Luminescence; Nanocrystals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on
  • Conference_Location
    Melbourne, VIC
  • ISSN
    1097-2137
  • Print_ISBN
    978-1-4673-3047-3
  • Type

    conf

  • DOI
    10.1109/COMMAD.2012.6472391
  • Filename
    6472391