Fabrication and characterization of piezoelectric cantilever array with nano-assembly carbon nanotube tips

Author

Tianlei Zhang ; Gang Zhao ; Jiaru Chu ; Wenhao Huang ; Bartenwerfer, Malte ; Eichhorn, Volkmar ; Fatikow, Sergej

Author_Institution

Dept. of Precision Machinery & Precision Instrum., Univ. of Sci. & Technol. of China, Hefei, China

fYear

2012

fDate

Aug. 29 2012-Sept. 1 2012

Firstpage

292

Lastpage

296

Abstract

Piezoelectric microcantilever transducers based on lead zirconate titanate (PZT) thin film have received considerable interest because of their wide potential applications in nanotechnology, biosensors and microelectromechanical systems. In this work a self-sensing and self-actuating PZT piezoelectric cantilever array is designed and fabricated for parallel dynamic Atomic Force Microscope (AFM) imaging. Carbon Nanotube (CNT) tips are assembled to the free end of the cantilever array by nano-handling to enhance the imaging resolution. Detailed fabrication process of the array and nano-assembly of CNT tips are reported and characterizations of mechanical properties of the array are carried out and presented in this paper.

Keywords

atomic force microscopy; carbon nanotubes; lead compounds; mechanical properties; microfabrication; microsensors; nanosensors; piezoelectric thin films; piezoelectric transducers; CNT tips; PZT; biosensors; carbon nanotube tips; imaging resolution enhancement; mechanical properties; microelectromechanical systems; nanoassembly carbon nanotube tips; nanotechnology; parallel dynamic AFM imaging; parallel dynamic atomic force microscope imaging; piezoelectric cantilever array fabrication; piezoelectric microcantilever transducers; self-actuating PZT piezoelectric cantilever array; self-sensing PZT piezoelectric cantilever array; Arrays; Assembly; Fabrication; Grippers; Scanning electron microscopy; Sensors; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on

Conference_Location

Shaanxi

Print_ISBN

978-1-4673-4588-0

Electronic_ISBN

978-1-4673-4589-7

Type

conf

DOI

10.1109/3M-NANO.2012.6472929

Filename

6472929