Title :
Large-scale assembly of single-walled carbon nanotube field effect transistor
Author :
Ke Xu ; Chengdong Wu ; Xiaojun Tian ; Haibo Yu ; Zaili Dong
Author_Institution :
State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
fDate :
Aug. 29 2012-Sept. 1 2012
Abstract :
This paper is to the assembly and fabrication for typical nano device-SWCNT FET for example, facing the large-scale assembly and fabrication for nano devices, and carrying out the experimental research. Assembly method of SWCNTs FET is by floating potential and dielectrophoresis principle. Six hundred devices were assembled less than per square centimeter. The experimental results showed that large-scale assembly was realized, and the success rate of ideal assembly for SWCNTs FET is achieved.
Keywords :
carbon nanotube field effect transistors; carbon nanotubes; electrophoresis; nanofabrication; C; assembly method; dielectrophoresis principle; floating potential; large-scale assembly; nanodevice; single-walled carbon nanotube field effect transistor; Assembly; Carbon nanotubes; Electric potential; Electrodes; Field effect transistors; Materials; Nanoscale devices; SWCNT FET; assembly; dielectrophoresis; floating potential; large-scale;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location :
Shaanxi
Print_ISBN :
978-1-4673-4588-0
Electronic_ISBN :
978-1-4673-4589-7
DOI :
10.1109/3M-NANO.2012.6472967
