Title :
Technology of in situ charge promotes the development of MEMS safety and arming device
Author :
Zou Jinlong ; Li Xiaojie ; Lei Yaru
Author_Institution :
Sci. & Technol. on Electromech. Dynamic Control Lab., Xi´an, China
fDate :
Aug. 29 2012-Sept. 1 2012
Abstract :
Based on the reading and the analyzing of relative literatures, this paper introduced basic concepts and fabrication processes of two in situ charge technologies - porous silicon energetic material and converting porous metal to primary explosive based on silicon process, and analyzed the structures and working principles of the micro-donators with two in situ charge technologies. This paper also introduced latest process of explosive train of the MEMS S&A. On these bases, the structure and working principle of silicon MEMS S&A proposed by US army was discussed, and this MEMS S&A is based on in situ charge and suitable for wafer-level mass fabrication. Some views about the development of the silicon MEMS S&A were also put forward.
Keywords :
elemental semiconductors; micromechanical devices; military systems; porous semiconductors; safety; semiconductor technology; silicon; MEMS safety and arming device; Si; US army; explosive train; in situ charge technology; microdonators; porous metal; porous silicon energetic material; primary explosive; silicon MEMS S&A; wafer-level mass fabrication; Bridge circuits; Explosives; Metals; Micromechanical devices; Silicon; Surface topography; In Situ Charge; MEMS Initiators; Micro-Detonator; Nanoporous Energetic Silicon; Safety and Arming Device;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location :
Shaanxi
Print_ISBN :
978-1-4673-4588-0
Electronic_ISBN :
978-1-4673-4589-7
DOI :
10.1109/3M-NANO.2012.6472987