Technology of in situ charge promotes the development of MEMS safety and arming device

Based on the reading and the analyzing of relative literatures, this paper introduced basic concepts and fabrication processes of two in situ charge technologies - porous silicon energetic material and converting porous metal to primary explosive based on silicon process, and analyzed the structures and working principles of the micro-donators with two in situ charge technologies. This paper also introduced latest process of explosive train of the MEMS S&A. On these bases, the structure and working principle of silicon MEMS S&A proposed by US army was discussed, and this MEMS S&A is based on in situ charge and suitable for wafer-level mass fabrication. Some views about the development of the silicon MEMS S&A were also put forward.