Title :
Determination of two-dimensional phase shifts in three-beam laser interference patterns
Author :
Yinbao Lei ; Zuobin Wang ; Jia Xu ; Jinjin Zhang ; Dapeng Wang ; Yu Hou ; Yong Yue ; Dayou Li
Author_Institution :
JR3CN & CNM, Changchun Univ. of Sci. & Technol., Changchun, China
fDate :
Aug. 29 2012-Sept. 1 2012
Abstract :
This paper describes a method of determining two-dimensional phase shifts. In this method, the two-dimensional phase shift is divided into horizontal and vertical components, and each component of the phase shift is determined by pattern correlation, Pythagorean theorem and linear interpolation with subpixel accuracy. The computer simulation and experiment have shown that the method is useful for the determination of phase difference between two three-beam interference patterns. The method can also be used to determine the phase shift in other multi-beam interference patterns.
Keywords :
interpolation; light interference; photolithography; 2D phase shift determination; Pythagorean theorem; computer simulation; horizontal component; linear interpolation; multibeam interference patterns; pattern correlation; phase difference determination; phase shift component; three-beam laser interference patterns; vertical component; Accuracy; Interference; Laser beams; Laser theory; Lithography; Mirrors; Optical beams; Laser interference lithography; correlation coefficient; two-dimensional phase shift;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location :
Shaanxi
Print_ISBN :
978-1-4673-4588-0
Electronic_ISBN :
978-1-4673-4589-7
DOI :
10.1109/3M-NANO.2012.6473001