Abstract :
The following topics are dealt with: fabrication technologies; packaging technologies; materials and device characterization; mechanical sensors and systems; physical MEMS; RF MEMS; bio & chemical micro sensors & systems; medical microsystems; micro-fluidic components and systems; micro-actuators; energy harvesting and power MEMS; and nano-electro-mechanical devices and systems.
Keywords :
biosensors; energy harvesting; micromechanical devices; RF MEMS; bio micro sensors; chemical micro sensors; energy harvesting; fabrication technology; mechanical sensors; medical microsystems; microactuators; microelectromechanical systems; microfluidic components; nanoelectromechanical devices; packaging technology; physical MEMS; power MEMS;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474159
