Title :
High data rate silicon optical modulator with self-aligned fabrication process
Author :
Thomson, David J. ; Gardes, Frederic Y. ; Fedeli, Jean-Marc ; Zlatanovic, S. ; Hu, Ya ; Kuo, Bill P.-P ; Myslivets, Evgeny ; Alic, Nikola ; Radic, Stojan ; Mashanovich, Goran Z. ; Reed, Graham T.
Author_Institution :
Adv. Technol. Inst., Univ. of Surrey, Guildford, UK
Abstract :
In this work we present optical modulation at both 40Gbit/s and 50Gbit/s from a carrier depletion based device in silicon. The modulator can be fabricated using a self-aligned process aiding performance reliability and device yield.
Keywords :
elemental semiconductors; optical design techniques; optical fabrication; optical modulation; silicon; Si; bit rate 40 Gbit/s; bit rate 50 Gbit/s; carrier depletion based device; optical modulator; self-aligned fabrication process; High-speed optical techniques; Optical device fabrication; Optical modulation; Optical waveguides; Phase shifters; Silicon;
Conference_Titel :
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2012 and the National Fiber Optic Engineers Conference
Conference_Location :
Los Angeles, CA
Print_ISBN :
978-1-4673-0262-3
