Wireless wafer probing for on-chip analog voltage measurement

This paper demonstrates a method for wirelessly measuring analog voltage on DUTs. This technique can be used for test structure characterization. The proposed voltage-to-time converter enables analog voltage values to be wirelessly delivered through capacitive coupling. A dualslope architecture is adopted to mitigate the effects of onchip R and C variation, and an UWB pulse generator is used to relay accurate timing to the ATE with low-power consumption. A prototype, fabricated in 0.13 μm CMOS achieves 8-bit resolution with 1 mV measurement steps. The total area of the on-chip wireless voltage measurement circuit is 0.013 mm² excluding wireless pads.