DocumentCode
60273
Title
Reliability Analysis of Permanent Degradations on AlGaN/GaN HEMTs
Author
Marcon, Denis ; Meneghesso, Gaudenzio ; Tian-Li Wu ; Stoffels, Steve ; Meneghini, Matteo ; Zanoni, Enrico ; Decoutere, Stefaan
Author_Institution
imec, Leuven, Belgium
Volume
60
Issue
10
fYear
2013
fDate
Oct. 2013
Firstpage
3132
Lastpage
3141
Abstract
In this paper, we review and add additional data and understandings on our findings on the two most common failure modes of GaN-based HEMTs: 1) permanent gate leakage current increase and 2) output current drop. We suggested that they have different origins and one is not necessarily correlated to the other. Yet, they can both concur to the device degradation. First, we demonstrate that the phenomenon of gate leakage current increase has a voltage-accelerated degradation kinetic. Therefore, the identification of the critical voltage for leakage increase is meaningless. We demonstrate that the time-to-breakdown tBD data are Weibull distributed and we prove that they represent intrinsic failures. According to our data, this phenomenon is not related to the inverse piezoelectric effect. Finally, a new degradation model for the gate leakage current increase based on the percolation path theory is proposed. Second, we show that the permanent output current drop is a consequence of the relaxation of AlGaN layer. This occurs by means of formation of crystallographic defects as described by the inverse piezoelectric degradation model. Finally, we show an excellent stability of devices with reduced Al content in the AlGaN barrier, proving the crucial role of strain in the reliability of AlGaN/GaN HEMTs.
Keywords
III-V semiconductors; Weibull distribution; aluminium compounds; failure analysis; gallium compounds; high electron mobility transistors; leakage currents; percolation; semiconductor device models; semiconductor device reliability; wide band gap semiconductors; AlGaN-GaN; HEMT; Weibull distribution; critical voltage identification; crystallographic defects; intrinsic failure analysis; inverse piezoelectric degradation model; percolation path theory; permanent device degradations; permanent gate leakage current; permanent output current drop; reliability analysis; voltage-accelerated degradation kinetic; Aluminum gallium nitride; Degradation; HEMTs; Leakage currents; Logic gates; MODFETs; Stress; Aluminum–gallium nitride; HEMTs; gallium nitride; reliability; transistors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2013.2273216
Filename
6570507
Link To Document