• DocumentCode
    604812
  • Title

    Capacitive accelerometer laboratory using polymer-film rapid prototyping technology

  • Author

    Gellineau, A.A. ; Rastegar, A.J. ; Howe, R.T.

  • Author_Institution
    Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
  • fYear
    2013
  • fDate
    4-5 March 2013
  • Firstpage
    79
  • Lastpage
    82
  • Abstract
    We present a rapid prototyping substitute for silicon MEMS Fabrication, which allows students to understand the fundamental tradeoffs in designing a planar accelerometer. The laboratory uses commercially available polymer-films and a CO2 laser cutter for device fabrication and design validation.
  • Keywords
    accelerometers; capacitive sensors; carbon compounds; elemental semiconductors; laser beam cutting; microfabrication; microsensors; polymer films; rapid prototyping (industrial); silicon; thin film sensors; CO2; CO2 laser cutter; Si; capacitive accelerometer laboratory; planar accelerometer; polymer-film rapid prototyping technology; silicon MEMS fabrication; Accelerometers; Capacitance; Fabrication; Laser beam cutting; Sensitivity; Springs; Tungsten; MEMS educational laboratory; accelerometer design; capacitive sensors; low-cost fabrication; rapid prototyping;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Interdisciplinary Engineering Design Education Conference (IEDEC), 2013 3rd
  • Conference_Location
    Santa Clara, CA
  • Print_ISBN
    978-1-4673-5113-3
  • Type

    conf

  • DOI
    10.1109/IEDEC.2013.6526764
  • Filename
    6526764
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=604812