Title :
Transfer-free grown bilayer graphene memory devices
Author :
Wessely, Pia Juliane ; Schwalke, Udo
Author_Institution :
Inst. for Semicond. Technol. & Nanoelectron., Tech. Univ. Darmstadt, Darmstadt, Germany
Abstract :
In this paper we report on the application of in-situ CCVD grown bilayer graphene field effect transistors (BiLGFETs) as memory devices, grown in a Silicon-CMOS compatible fabrication process. By means of catalytic chemical vapor deposition (CCVD) the BiLGFETs are realized directly on oxidized silicon substrate without transfer. These BiLGFETs possess unipolar p-type device characteristics with a high on/off-current ratio between 1×105 and 1×107 at room temperature [1, 2]. The hysteresis of BiLGFETs depends on the cycling range of the applied backgate voltage VBG while the sub-threshold slope is uniform for varied temperatures and varied cycling ranges of the backgate voltage [3]. Based on the observed properties of BiLGFETs it is possible to use BiLGFETS as memory devices.
Keywords :
CMOS memory circuits; chemical vapour deposition; field effect transistors; graphene; semiconductor growth; BiLGFET; Si; backgate voltage; catalytic chemical vapor deposition; in-situ CCVD grown bilayer graphene field effect transistors; memory devices; oxidized silicon substrate; silicon-CMOS compatible fabrication process; subthreshold slope; temperature 293 K to 298 K; transfer-free grown bilayer graphene memory devices; unipolar p-type device characteristics; Annealing; CMOS integrated circuits; Graphene; Nickel; Silicon; Silicon carbide; Transforms;
Conference_Titel :
Design & Technology of Integrated Systems in Nanoscale Era (DTIS), 2013 8th International Conference on
Conference_Location :
Abu Dhabi
Print_ISBN :
978-1-4673-6039-5
Electronic_ISBN :
978-1-4673-6038-8
DOI :
10.1109/DTIS.2013.6527769