Title :
Optimal design of a resonating MEMS magnetometer: A multi-physics approach
Author :
Corigliano, Alberto ; Bagherinia, M. ; Bruggi, M. ; Mariani, Stefano ; Lasalandra, E.
Author_Institution :
Dipt. di Ing. Civile e Ambientale, Politec. di Milano, Milan, Italy
Abstract :
A multi-physics model for a beam subject to current flow in a magnetic field is proposed which takes into account thermal and non-linear geometrical effects. The model is applied to the study of a Lorentz-force MEMS magnetometer. A topology optimization algorithm in which geometrical parameters of the beam subject to Lorentz force are considered optimization variables is proposed and discussed.
Keywords :
magnetometers; micromechanical resonators; microsensors; Lorentz force MEMS magnetometer; current flow; magnetic field; multiphysics approach; nonlinear geometrical effect; resonating MEMS magnetometer; thermal effect; Abstracts; Magnetometers; Micromechanical devices; Minimization; Oscillators;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2013 14th International Conference on
Conference_Location :
Wroclaw
Print_ISBN :
978-1-4673-6138-5
DOI :
10.1109/EuroSimE.2013.6529931
