Title :
A cost effective AFM setup, combining interferometry and FPGA
Author :
Couturier, Raphail ; Domas, S. ; Goavec-Merou, Gwenhael ; Favre, M. ; Lenczner, M. ; Meister, A.
Author_Institution :
DISC, Univ. of Franche-Comte, Belfort, France
Abstract :
Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus on an interferometry method for estimation of deflections in arrays of cantilever in quasi-static regime. We propose a novel complete solution with a least square based algorithm to determine interference fringe phases and its optimized FPGA implementation. Simulations and real tests show very good results and open perspectives for real-time estimation and control of cantilever arrays in the dynamic regime.
Keywords :
atomic force microscopy; field programmable gate arrays; light interferometry; AFM setup; FPGA; atomic force microscopes; cantilever array; interference fringe phase; interferometry method; quasistatic regime; Abstracts; Computational modeling; Equations; Interpolation; Mathematical model; Noise; Splines (mathematics);
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2013 14th International Conference on
Conference_Location :
Wroclaw
Print_ISBN :
978-1-4673-6138-5
DOI :
10.1109/EuroSimE.2013.6529935
