Title :
VACNT fabrication on aluminum using “fast-heating” thermal CVD
Author :
Zhaoli Gao ; Yuen, M.M.F.
Author_Institution :
Dept. of Mech. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
Abstract :
A fast-heating scheme is utilized for long VACTN-TIM fabrication directly on metal substrate. VACNT arrays with lengths of more than 100 μm were achieved on Al thin film by a conventional thermal CVD at a low temperature of 600 °C. Our methodology allows patterned VACNT array fabrication using a standard lift-off process for various applications, such as thermal interface materials, super capacitor field emission devices and electronic interconnects.
Keywords :
aluminium; carbon nanotubes; heating; Al; C; VACTN-TIM array fabrication; aluminum; conventional thermal CVD; fast-heating thermal CVD; lift-off process; temperature 600 degC; vertically aligned carbon nanotube array structures; Abstracts; Artificial intelligence; Carbon; Fabrication; Heating; Iron; Mechanical factors;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2013 14th International Conference on
Conference_Location :
Wroclaw
Print_ISBN :
978-1-4673-6138-5
DOI :
10.1109/EuroSimE.2013.6529955
