Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma

Author

Seung-Ju Oh ; Hyo-Chang Lee ; Chin-Wook Chung

Author_Institution

Dept. of Electr. Eng., Hanyang Univ., Seoul, South Korea

Volume

43

Issue

8

fYear

2015

fDate

Aug. 2015

Firstpage

2766

Lastpage

2767

Abstract

In this paper, numerical calculations of the surface coil current and the spatial electric field in the vicinity of the antenna were investigated using wireless power transfer method. It is observed that the wirelessly transferred power to a resonant coil is dramatically changed with a variation of the excitation frequency. This result indicates that the spatial plasma distribution can be controlled through wireless resonance power transfer. This method could be applied to the large-area plasma source.

Keywords

antennas in plasma; numerical analysis; plasma diagnostics; plasma sources; antenna; excitation frequency variation; inductively coupled plasma; large-area plasma source; numerical calculations; resonant coil; spatial electric field; spatial plasma distribution; spatial power deposition control; wireless power transfer method; wireless resonance power transfer; Antennas; Couplings; Plasma density; Plasma sources; Resonant frequency; Wireless communication; Inductively coupled plasma (ICP); spatial plasma distribution; wireless power transfer; wireless power transfer.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2015.2445936

Filename

7151841