Title :
Laser-assisted SER estimation in advanced CMOS technologies
Author :
Ascazubi, R. ; Modoran, G. ; Gill, Brijesh ; Seifert, N.
Author_Institution :
Technol. Manuf. Group, Intel Corp., Hillsboro, OR, USA
Abstract :
Pulsed laser irradiation is proposed as a fast turn-around tool to predict the soft error rate (SER) performance in modern process technologies. 32nm planar and 22nm Tri-Gate device-level proton and laser cross section results are presented.
Keywords :
CMOS integrated circuits; radiation hardening (electronics); advanced CMOS technologies; laser cross section; laser-assisted SER estimation; size 22 nm; soft error rate performance; trigate device-level proton; turn-around tool; Correlation; Laser beams; Laser modes; Measurement by laser beam; Protons; Semiconductor lasers; Backside Laser Testing; SEE (single event effects); SER(soft error rate); SEU (single event upset);
Conference_Titel :
Reliability Physics Symposium (IRPS), 2013 IEEE International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4799-0112-8
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2013.6531993
