• DocumentCode
    608256
  • Title

    Bias Temperature Stress (BTS) induced ESD device´s leakage issue and Its preventing solutions in smart power technology

  • Author

    Chien-Fu Huang ; Yi-Feng Chang ; Shui-Ming Cheng ; Ming-Hsiang Song

  • Author_Institution
    TSMC, Hsinchu, Taiwan
  • fYear
    2013
  • fDate
    14-18 April 2013
  • Abstract
    A leakage issue induced by Bias Temperature Stress (BTS) is found in a NPN-based ESD clamp. BTS (1.1*Vdd, 125C, 8hrs) can cause an accumulation of drifted ions at an/the STI interface which leads to increased leakage and eventual device failure. TCAD simulation and activation energy extraction model are used to explain the mechanism and two solutions are proposed.
  • Keywords
    circuit simulation; clamps; electrostatic discharge; integrated circuit design; integrated circuit modelling; leakage currents; power integrated circuits; stress analysis; technology CAD (electronics); BTS; ESD device leakage current issue; NPN-based ESD clamp; STI interface; TCAD simulation; activation energy extraction model; bias temperature stress; device failure; ion drifting accumulation; smart power technology; temperature 125 C; time 8 hour; voltage 1.1 V; Breakdown voltage; Clamps; Electric fields; Electrostatic discharges; Ions; Leakage currents; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium (IRPS), 2013 IEEE International
  • Conference_Location
    Anaheim, CA
  • ISSN
    1541-7026
  • Print_ISBN
    978-1-4799-0112-8
  • Electronic_ISBN
    1541-7026
  • Type

    conf

  • DOI
    10.1109/IRPS.2013.6532075
  • Filename
    6532075