DocumentCode
608281
Title
Electrical performances of SiO2 -doped GeTe for phase-change memory applications
Author
Navarro, G. ; Persico, A. ; Henaff, E. ; Aussenac, F. ; Noe, P. ; Jahan, C. ; Perniola, L. ; Sousa, V. ; Vianello, E. ; De Salvo, B.
Author_Institution
LETI, CEA, Grenoble, France
fYear
2013
fDate
14-18 April 2013
Abstract
We present for the first time, the effects of SiO2-doping in GeTe-based Phase-Change Memory (PCM) technology. We demonstrate a 50% RESET power reduction correlated with the enhanced thermal and electrical efficiency of the cell by SiO2-doping. Moreover we show the possibility to engineer the threshold voltage (VTH) of the cell at high operating temperature, thanks to the changed crystallization dynamics induced by SiO2 doping into GeTe.
Keywords
germanium compounds; phase change memories; semiconductor doping; silicon compounds; GeTe; PCM technology; SiO2; SiO2-doped GeTe; crystallization dynamics; electrical efficiency; electrical performance; phase-change memory application; power reduction; thermal efficiency; threshold voltage; Crystallization; Phase change materials; Phase change memory; Resistance; Thermal stability; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium (IRPS), 2013 IEEE International
Conference_Location
Anaheim, CA
ISSN
1541-7026
Print_ISBN
978-1-4799-0112-8
Electronic_ISBN
1541-7026
Type
conf
DOI
10.1109/IRPS.2013.6532100
Filename
6532100
Link To Document