• DocumentCode
    608856
  • Title

    Optical waveguides and photodiodes in 0.18µm CMOS SOI with no post-processing

  • Author

    Xuebei Yang ; Babakhani, A.

  • Author_Institution
    Electr. & Comput. Eng. Dept., Rice Univ., Houston, TX, USA
  • fYear
    2013
  • fDate
    17-21 March 2013
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We demonstrate the first optical waveguide and fastest photodiode implemented in a commercial CMOS technology without performing any post-processing. The measured waveguide loss at 1.55μm is 37dB/cm and bandwidth of photodiode exceeds 9.2GHz at 850nm.
  • Keywords
    CMOS integrated circuits; integrated optoelectronics; optical losses; optical waveguides; photodiodes; silicon-on-insulator; CMOS SOI; Si; commercial CMOS technology; frequency 9.2 GHz; optical waveguides; photodiode bandwidth; size 0.18 mum; waveguide loss; wavelength 850 nm; Bandwidth; CMOS integrated circuits; Metals; Optical device fabrication; Optical losses; Optical waveguides; Photodiodes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013
  • Conference_Location
    Anaheim, CA
  • Print_ISBN
    978-1-4799-0457-0
  • Type

    conf

  • Filename
    6532996
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=608856