Title :
Optical waveguides and photodiodes in 0.18µm CMOS SOI with no post-processing
Author :
Xuebei Yang ; Babakhani, A.
Author_Institution :
Electr. & Comput. Eng. Dept., Rice Univ., Houston, TX, USA
Abstract :
We demonstrate the first optical waveguide and fastest photodiode implemented in a commercial CMOS technology without performing any post-processing. The measured waveguide loss at 1.55μm is 37dB/cm and bandwidth of photodiode exceeds 9.2GHz at 850nm.
Keywords :
CMOS integrated circuits; integrated optoelectronics; optical losses; optical waveguides; photodiodes; silicon-on-insulator; CMOS SOI; Si; commercial CMOS technology; frequency 9.2 GHz; optical waveguides; photodiode bandwidth; size 0.18 mum; waveguide loss; wavelength 850 nm; Bandwidth; CMOS integrated circuits; Metals; Optical device fabrication; Optical losses; Optical waveguides; Photodiodes;
Conference_Titel :
Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4799-0457-0
