Title :
Towards athermal nanoplasmonic resonators based on Cu-Tio2-Si hybrid plasmonic waveguide
Author :
Shiyang Zhu ; Lo, G.Q. ; Jielin Xie ; Kwong, D.L.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
Owing to the negative thermo-optic coefficient (TOC) of titanium dioxide, the real effective modal index of Cu-TiO2-Si hybrid plasmonic waveguides can be potentially temperature independent. High-performance Cu-TiO2-Si waveguide-ring resonators (WRRs) are experimentally demonstrated on SOI platform using standard CMOS technology. TOC of the group index is measured to be ~1.09×10-4 K-1 for a WRR with 220-nm-high Si core and 58-nm-thick TiO2. TOC of the as-deposited TiO2 is estimated to ~ -1.0×10-4 K-1.
Keywords :
CMOS integrated circuits; copper; elemental semiconductors; integrated optoelectronics; nanophotonics; optical resonators; optical waveguides; plasmonics; silicon; silicon-on-insulator; thermo-optical effects; titanium compounds; Cu-TiO2-Si; SOI platform; Si; Si core; TOC; WRR; athermal nanoplasmonic resonators; group index; high-performance waveguide-ring resonators; hybrid plasmonic waveguide; negative thermooptic coefficient; real effective modal index; size 220 nm; size 58 nm; standard CMOS technology; temperature independence; titanium dioxide; Indexes; Optical films; Optical resonators; Optical waveguides; Plasmons; Silicon; Temperature measurement;
Conference_Titel :
Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4799-0457-0
