Title :
Effect of different proof mass supports on accelerometer sensitivity
Author :
Singh, Prashant ; Srivastava, Prashant ; Chaudhary, Raghvendra Kumar ; Gupta, Puneet
Author_Institution :
Dept. of Microelectron., Indian Inst. of Inf. Technol., Allahabad, India
Abstract :
The present paper deals with the effect of folded beam and spring support incorporated to the proof mass on comb displacement and sensitivity. The study is made for folded beam and spring type support. All the experiments are carried out on COMSOL Multiphysics 4.3 simulation tool.
Keywords :
accelerometers; sensitivity; COMSOL multiphysics 4.3 simulation tool; accelerometer sensitivity; comb displacement; comb sensitivity; folded beam; proof mass; spring type support; Accelerometers; Capacitance; Fingers; Force; Resonant frequency; Sensors; Springs; MEMS; capacitive sensing; in-plane sensing; interdigited fingers; out-of-plane sensing;
Conference_Titel :
Energy Efficient Technologies for Sustainability (ICEETS), 2013 International Conference on
Conference_Location :
Nagercoil
Print_ISBN :
978-1-4673-6149-1
DOI :
10.1109/ICEETS.2013.6533506
