Fabrication of a 3 GHz oscillator based on nano-carbon-diamond-film-based guided wave resonators

In this work, we have developed high frequency resonators for frequency source applications. These resonators were built using E-beam lithography on ZnO/NCD/Si substrate, exploiting the nucleation side of the NCD to allow for a reliable and reproducible lithography step. NCD films and substrates have also been used to minimize the acoustic losses due to large grain overlays favoring acoustic diffusion along the surface propagation. Single and double port resonators have been built in the 3-6 GHz frequency range. Double port resonators have revealed compatible with the oscillator application, yielding a first oscillator demonstration near 3 GHz. Considering the operation condition of this oscillator, one should improve the corresponding stability characteristics without too much efforts, simply developing an adapted packaging of the resonator and a robust low noise amplifier loop.