Micromachined thin film plate acoustic resonators (FPAR): Theory and applications

This work presents some of the most important results regarding the development of thin film plate acoustic wave resonators at Uppsala University, Sweden. Current studies are focused on the estimation of the sensing capabilities of the SO FPAR with respect to mass and pressure. The potential of this technology is yet to be realized. Other modes like the first asymmetric and the first symmetric Lamb waves can be of interest too. The first one can be promising candidate for chemical sensor utilizing visco-elastic organic films due to its quasi shear nature [6, 18], while the second one could be promising for building resonators with significantly higher electromechanical couplings [6, 18].