DocumentCode
609652
Title
Improving and optimizing reliability in future technologies with high-κ dielectrics
Author
Linder, B.P. ; Cartier, E. ; Krishnan, Sridhar ; Wu, E.
Author_Institution
IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
fYear
2013
fDate
22-24 April 2013
Firstpage
1
Lastpage
4
Abstract
Three mechanisms primarily limit gate oxide scaling: bias temperature instability in both NFETs (PBTI) and PFETs (NBTI), and gate dielectric breakdown in NFETs (nTDDB). Strategies for reducing each mechanism are identified, and the overall effect of each mechanism on future scaling is discussed. Specialized ring oscillator structures that aid in the understanding of the effect of both PBTI and NBTI on circuit operation are explored.
Keywords
electric breakdown; field effect transistors; high-k dielectric thin films; negative bias temperature instability; oscillators; semiconductor device reliability; NBTI; NFET; PBTI; PFET; gate dielectric breakdown; high-κ dielectrics; reliability optimization; specialized ring oscillator structures; Degradation; Dielectrics; Integrated circuit reliability; Logic gates; Stress; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Design, Automation, and Test (VLSI-DAT), 2013 International Symposium on
Conference_Location
Hsinchu
Print_ISBN
978-1-4673-4435-7
Type
conf
DOI
10.1109/VLDI-DAT.2013.6533828
Filename
6533828
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