Title :
Dark current and white blemish in image sensors
Author_Institution :
Image Sensor Div., Panasonic Corp., Kyoto, Japan
Abstract :
It has been always biggest issues to reduce dark current and white blemish in image sensor development. For this purpose, various analysis methods and gettering methods have been developed.
Keywords :
image sensors; dark current; image quality; image sensor; white blemish; Crystals; Dark current; Etching; Gettering; Image sensors; Metals; Silicon;
Conference_Titel :
VLSI Technology, Systems, and Applications (VLSI-TSA), 2013 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
978-1-4673-3081-7
Electronic_ISBN :
978-1-4673-6422-5
DOI :
10.1109/VLSI-TSA.2013.6545639
