Title :
Micromachined gap waveguides for 100 GHz applications
Author :
Rahiminejad, S. ; Raza, Haider ; Zaman, A.U. ; Haasl, S. ; Enoksson, P. ; Kildal, Per-Simon
Author_Institution :
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Gothenburg, Sweden
Abstract :
The present paper demonstrates groove gap waveguides at around 100 GHz, fabricated on Gold-plated micromachined silicon. Three different groove gap waveguides have been manufactured and measured: a resonator for determining Q-factor and thereby attenuation, a straight waveguide, and a waveguide with two 90 degree bends.
Keywords :
Q-factor; elemental semiconductors; gold; micromachining; millimetre wave resonators; silicon; waveguides; Ag-Si; Q-factor; frequency 100 GHz; gold-plated micromachined silicon; groove gap waveguides; micromachined gap waveguides; resonator; Antennas; Loss measurement; Nails; Pins; Transmission line measurements; Waveguide discontinuities; Bed of nails; Gap Waveguide; Groove; High-frequency; Micromachining; Waveguide;
Conference_Titel :
Antennas and Propagation (EuCAP), 2013 7th European Conference on
Conference_Location :
Gothenburg
Print_ISBN :
978-1-4673-2187-7
Electronic_ISBN :
978-88-907018-1-8
