Title :
Performance comparison of commonly used MEMS springs: Double-folded, U-shaped and fish-hook
Author :
Radwan, Abdulaziz N. ; Almikhlafi, Ridha S. ; Soliman, M.S.M.
Author_Institution :
Nat. Center for Electron., Commun. & Photonics (ECP), King Abdulaziz City for Sci. & Technol. (KACST), Riyadh, Saudi Arabia
Abstract :
This paper presents a performance comparison of three commonly-used MEMS springs: Double-folded, U-shaped and fish-hook, which are attached each to a same-size proof-mass constituting a mass-spring resonating system oscillating in-plane at 10 kHz. ANSYS Finite Element Analysis (FEA) is performed in order to compare the modal and static analysis among the springs. The effect of fabrication imperfection is also included in the comparison. It is found out that the analyzed Double Folded Beam (DFB) spring demonstrated strongest immunity of about 1% frequency deviation to MEMS fabrication imperfections and against off-axis errors.
Keywords :
finite element analysis; micromechanical resonators; springs (mechanical); ANSYS; MEMS fabrication imperfections; MEMS springs; double folded beam spring; finite element analysis; frequency 10 kHz; mass-spring resonating system; modal analysis; off-axis errors; static analysis; Fabrication; Finite element analysis; Force; Micromechanical devices; Resonant frequency; Springs; Stress; SOI-MUMPs; cross-axis coupling; over-etching; spring stiffness; stress fracture; under-etching;
Conference_Titel :
Electronics, Communications and Photonics Conference (SIECPC), 2013 Saudi International
Conference_Location :
Fira
Print_ISBN :
978-1-4673-6196-5
Electronic_ISBN :
978-1-4673-6194-1
DOI :
10.1109/SIECPC.2013.6550993
