Title :
Modeling of the dielectric barrier RF discharge at atmospheric pressure
Author :
Chaplinskiy, R.U.
Author_Institution :
Dept. of Electron. Devices, NTUU KPI, Kiev, Ukraine
Abstract :
One dimensional hybrid modeling of the dielectric barrier radio frequency (DBRF) discharge at atmospheric pressure in argon is performed. Electrons in this model are described in kinetic way and heavy species in hydrodynamic way. Electron density, capacitive power deposition and electrons temperature distributions in the discharge gap for low and high current modes of the DBRF discharge as well as volt-ampere characteristics of DBRF discharge are calculated. The differences between radio-frequency discharge with bare electrodes and DBRF discharge are established.
Keywords :
argon; high-frequency discharges; plasma density; plasma dielectric properties; plasma radiofrequency heating; plasma simulation; 1D hybrid modeling; Ar; DBRF discharge; bare electrodes; capacitive power deposition; dielectric barrier radiofrequency discharge; discharge gap; electron density; electrons temperature distributions; hydrodynamic way; pressure 1 atm; volt-ampere characteristics; Argon; Atmospheric modeling; Dielectrics; Discharges (electric); Mathematical model; Plasmas; Radio frequency; atmospheric pressure; dielectric barrier RF discharge; non-thermal plasma;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2013 IEEE XXXIII International Scientific Conference
Conference_Location :
Kiev
Print_ISBN :
978-1-4673-4669-6
DOI :
10.1109/ELNANO.2013.6551997
