DocumentCode
614421
Title
Controllable growth of copper fractal aggregates on structurally modified silicon surface
Author
Boyko, Anton ; Timoshenkov, S. ; Litmanovich, Dmitry ; Gaev, Dahir
Author_Institution
Dept. of Microelectron., Nat. Res. Univ. of Electron. Technol., Moscow, Russia
fYear
2013
fDate
16-19 April 2013
Firstpage
185
Lastpage
187
Abstract
Copper layers of highly developed surface have been formed by electrodeposition technique on structurally modified silicon substrate. Silicon patterns were obtained by electrochemical anodizing as well as by wet etching and acted the part of solidification centers at the growth process. The effect of the current density on the morphology of copper fractal aggregates has been investigated. It was found that a change of current density has a significant impact on texture and fractal dimension of the aggregates. Increasing of the current density from 0.25 to 1.5 mA/cm2 changes form of the fractals from spherical to symmetrically branched (dendritic) and fractal dimension from 2.55 up to 2.8 respectively. All the samples are of uniform quasi-periodical distribution of the aggregates over the surface that is substantially conditioned by properties of the modified surface.
Keywords
aggregates (materials); anodisation; copper; current density; electrochemistry; electrodeposition; etching; fractals; surface morphology; surface texture; Cu; Si; copper fractal aggregates; current density; electrochemical anodizing; electrodeposition; morphology; solidification centers; structurally modified silicon substrate surface; texture; wet etching; Aggregates; Copper; Current density; Fractals; Silicon; Surface morphology; Surface treatment; advanced materials; fractals; nanostructuring; porous silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics and Nanotechnology (ELNANO), 2013 IEEE XXXIII International Scientific Conference
Conference_Location
Kiev
Print_ISBN
978-1-4673-4669-6
Type
conf
DOI
10.1109/ELNANO.2013.6551999
Filename
6551999
Link To Document