• DocumentCode
    614421
  • Title

    Controllable growth of copper fractal aggregates on structurally modified silicon surface

  • Author

    Boyko, Anton ; Timoshenkov, S. ; Litmanovich, Dmitry ; Gaev, Dahir

  • Author_Institution
    Dept. of Microelectron., Nat. Res. Univ. of Electron. Technol., Moscow, Russia
  • fYear
    2013
  • fDate
    16-19 April 2013
  • Firstpage
    185
  • Lastpage
    187
  • Abstract
    Copper layers of highly developed surface have been formed by electrodeposition technique on structurally modified silicon substrate. Silicon patterns were obtained by electrochemical anodizing as well as by wet etching and acted the part of solidification centers at the growth process. The effect of the current density on the morphology of copper fractal aggregates has been investigated. It was found that a change of current density has a significant impact on texture and fractal dimension of the aggregates. Increasing of the current density from 0.25 to 1.5 mA/cm2 changes form of the fractals from spherical to symmetrically branched (dendritic) and fractal dimension from 2.55 up to 2.8 respectively. All the samples are of uniform quasi-periodical distribution of the aggregates over the surface that is substantially conditioned by properties of the modified surface.
  • Keywords
    aggregates (materials); anodisation; copper; current density; electrochemistry; electrodeposition; etching; fractals; surface morphology; surface texture; Cu; Si; copper fractal aggregates; current density; electrochemical anodizing; electrodeposition; morphology; solidification centers; structurally modified silicon substrate surface; texture; wet etching; Aggregates; Copper; Current density; Fractals; Silicon; Surface morphology; Surface treatment; advanced materials; fractals; nanostructuring; porous silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics and Nanotechnology (ELNANO), 2013 IEEE XXXIII International Scientific Conference
  • Conference_Location
    Kiev
  • Print_ISBN
    978-1-4673-4669-6
  • Type

    conf

  • DOI
    10.1109/ELNANO.2013.6551999
  • Filename
    6551999