TSV density impact on 3D power delivery with high aspect ratio TSVs

This paper reports on modeling of the power delivery in TSV-based 3D systems, i.e., vertically integrated ICs with uniformly-distributed high-aspect-ratio through-silicon vias (TSVs). The voltage drop and di/dt noise are modeled to evaluate the impact of TSV density and TSV aspect ratio (AR). The frequency dependency of TSV parasitics is modeled with fullwave EM simulator, and the performance of the power delivery network (PDN) is analyzed in the frequency domain. PDNs with low-AR and high-AR TSVs are compared for trade-off analysis in terms of power delivery performance and TSV area occupation, which is critical for the design of TSV-based 3D power delivery.