Title :
Design-enabled manufacturing enablement using manufacturing design request tracker (MDRT)
Author :
Sultan, Ahmed ; Desineni, Rao ; Hassmann, Jens ; Hoeppner, Kristina ; Ramanathan, Eswar ; Babcock, Carl ; Kok Peng Chua ; Teoh, Edward ; Dai, Vito ; Yeo, Sky ; Hui, Colin ; Capodieci, Luigi ; McGowan, Sarah ; Madge, Robert
Author_Institution :
GLOBALFOUNDRIES, Malta, NY, USA
Abstract :
The shrinking dimensions with advanced technologies pose yield challenges which require continuous enhancement of yield methodologies to quickly detect and fix the marginal layout features. In this paper, we present a practical approach to enhance the DFM and DEM capabilities suite provided by GLOBALFOUNDRIES for 28nm technology and beyond. The MDRT system has been implemented in the Product Lifecycle Management (PLM) system within GLOBALFOUNDRIES.
Keywords :
design for manufacture; integrated circuit layout; product life cycle management; semiconductor device manufacture; DEM capability; DFM capability; GLOBALFOUNDRIES; MDRT; PLM; design enabled manufacturing; design for manufacturing; design-enabled manufacturing enablement; manufacturing design request tracker; marginal layout features; product lifecycle management; shrinking dimensions; size 28 nm; Databases; Inspection; Layout; Libraries; Manufacturing; Metrology; Systematics; OPC; bridging; systematic layout defects; yield learning;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-4673-5006-8
DOI :
10.1109/ASMC.2013.6552799
