Title :
Equipment automation framework with embedded Interface-A
Author :
Kinauer, Jochen ; Muller, Benjamin
Author_Institution :
AIS Autom. Dresden GmbH, Dresden, Germany
Abstract :
Project report based on the development and deployment of an equipment automation framework at a 200mm semiconductor fab. The emphasis of this paper will be on the integrated Interface-A Port and the capabilities of the EES System - including screenshots of the implemented system.
Keywords :
production equipment; semiconductor industry; EES system; embedded interface-A port; equipment automation framework; integrated interface-A port; semiconductor fab; Automation; Manufacturing; Ports (Computers); Process control; Production facilities; Software; Standards;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-4673-5006-8
DOI :
10.1109/ASMC.2013.6552802
