Title :
Nanoscale resonant-cavity-enhanced Germanium photodetectors with lithographically defined spectral response for improved performance at telecommunications wavelengths
Author :
Balram, Krishna C. ; Audet, Ross M. ; Miller, David A. B.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
Abstract :
We demonstrate planar resonant photodetectors based on germanium fins self-aligned to metallic slits. By varying the fin widths, we engineer detectors with tunable and extended spectral response spanning the telecommunications Cand L-bands.
Keywords :
elemental semiconductors; germanium; optical communication equipment; photodetectors; photolithography; Ge; extended spectral response; fin widths; lithography; metallic slits; nanoscale resonant-cavity-enhanced germanium photodetectors; planar resonant photodetectors; self-aligned germanium fins; telecommunication C-band; telecommunication L-band; telecommunication wavelengths; tunable spectral response; Absorption; Detectors; Gold; Photodetectors; Substrates; Telecommunications; Wavelength measurement;
Conference_Titel :
Optical Interconnects Conference, 2013 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4673-5061-7
Electronic_ISBN :
978-1-4673-5062-4
DOI :
10.1109/OIC.2013.6552906
