Title :
Inter-layer grating coupler on double-layer silicon nanomembranes
Author :
Yang Zhang ; Kwong, David ; Xiaochuan Xu ; Hosseini, Amir ; Yang, S.Y. ; Rogers, John A. ; Chen, Ray T.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.
Keywords :
adhesive bonding; diffraction gratings; elemental semiconductors; integrated optoelectronics; membranes; nanofabrication; nanophotonics; nanostructured materials; optical couplers; optical fabrication; silicon; Si; adhesive bonding; efficiency 25 percent; interlayer coupling efficiency; interlayer grating coupler; on-chip double-layer single crystalline silicon nanomembranes; subwavelength nanostructure; Amorphous silicon; Couplers; Couplings; Gratings; Optical waveguides; Inter-layer grating coupler; silicon nanomembrane; subwavelength nanostructure;
Conference_Titel :
Optical Interconnects Conference, 2013 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4673-5061-7
Electronic_ISBN :
978-1-4673-5062-4
DOI :
10.1109/OIC.2013.6552911
