Title :
Integration of silicon photonics in a bulk CMOS memory flow
Author :
Meade, Roy ; Tehar-Zahav, Ofer ; Sternberg, Zvi ; Megged, Efraim ; Sandhu, Gurtej ; Orcutt, Jason S. ; Ram, Rajeev ; Stojanovic, V. ; Watts, Michael R. ; Timurdogan, Erman ; Shainline, Jeffrey ; Popovic, M.
Author_Institution :
Process R&D, Micron Technol., Inc., Boise, ID, USA
Abstract :
Monolithically integrated silicon photonic (SiP) devices have been demonstrated using a modified bulk CMOS flow. Integration was achieved by nominally extending existing process and design collateral without shifting the CMOS parameterization.
Keywords :
CMOS memory circuits; elemental semiconductors; integrated optoelectronics; monolithic integrated circuits; optical interconnections; silicon; CMOS parameterization; Si; bulk CMOS memory flow; monolithically integrated silicon photonic devices; silicon photonics; Adaptive optics; Attenuation; CMOS integrated circuits; Optical device fabrication; Optical interconnections; Optical waveguides; Random access memory; bulk CMOS; optical interconnections;
Conference_Titel :
Optical Interconnects Conference, 2013 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4673-5061-7
Electronic_ISBN :
978-1-4673-5062-4
DOI :
10.1109/OIC.2013.6552950
