Title :
To develop an optical system model for image based multi-degree-of-freedom measurement system
Author :
Chun-Jen Chen ; Chun-Li Chang ; Wen-Tse Hsiao ; Min-Wei Hung ; Wenyuh Jywe ; Yunfeng Teng
Author_Institution :
Nat. Appl. Res. Labs., Instrum. Technol. Res. Center, Hsinchu, Taiwan
Abstract :
This paper subjects an optoelectronic multi-degree-of-freedom (DOF) measurement system to establish the optical system model. Through the optical model, the multi-DOF motion can be carried out by the laser spot variation. The multi-DOF measurement system includes 2 digital image sensors and 4 laser diodes. It improves the disadvantage of conventional multi-DOF measurement system. The conventional multi-DOF measurement system usually needs many position sensing detectors (PSD) and each PSD must have enough space. Therefore, the conventional multi-DOF measurement system needs large space. Because one image sensor can sense multi laser spot simultaneously, the structure of proposed multi-DOF measurement system can be simplified.
Keywords :
image sensors; semiconductor lasers; image based multi-degree-of-freedom measurement system; image sensors; laser diodes; optical system model; optoelectronic multi-degree-of-freedom measurement system; position sensing detectors; Adaptive optics; Cameras; Image sensors; Measurement by laser beam; Optical sensors; Optical system modeling; imaging sensor; multi degree-of-freedom measurement system;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2013 IEEE International
Conference_Location :
Minneapolis, MN
Print_ISBN :
978-1-4673-4621-4
DOI :
10.1109/I2MTC.2013.6555481