DocumentCode :
616839
Title :
Measurement technique for characterizing constitutive material properties of thin films
Author :
Sharma, Ashok ; Afsar, Mohammed N.
Author_Institution :
Dept. of Electr. & Comput. Eng., Tufts Univ., Medford, MA, USA
fYear :
2013
fDate :
6-9 May 2013
Firstpage :
1261
Lastpage :
1265
Abstract :
A transmission reflection based waveguide technique has been proposed to calculate the permittivity and permeability of thin film samples. Known thin film materials have been studied to validate the technique. The measurements have been carried out in the frequency range from 5.85 GHz to 12.4 GHz. The possible sources of errors in the measurement of scattering parameters have been identified and methods to eliminate these errors have been proposed.
Keywords :
S-parameters; magnetic permeability measurement; permittivity measurement; constitutive material properties; frequency 5.85 GHz to 12.4 GHz; measurement error; measurement technique; permeability calculation; permittivity calculation; scattering parameter; thin film; transmission reflection based waveguide technique; Biomedical measurement; Materials; Permeability; Permeability measurement; Permittivity; Permittivity measurement; Scattering parameters; loss tangent; multi-layer filter; permeablity; permittivity; waveguie;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2013 IEEE International
Conference_Location :
Minneapolis, MN
ISSN :
1091-5281
Print_ISBN :
978-1-4673-4621-4
Type :
conf
DOI :
10.1109/I2MTC.2013.6555616
Filename :
6555616
Link To Document :
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