Title :
Influence of excitation waveform and oscillator geometry on the resonant pull-in of capacitive MEMS oscillators
Author :
Juillard, Jerome ; Arndt, Gregory ; Arcamone, J. ; Colinet, E.
Author_Institution :
E3S, SUPELEC, Gif-sur-Yvette, France
Abstract :
The purpose of this paper is to provide a simple framework for determining the resonant pull-in of MEMS oscillators, either parallel-plate, CC-beam or cantilever, under two-sided sinusoidal, square-wave or pulse-actuation. Furthermore, the values of the resonant and static pull-in amplitudes are calculated and tabulated, in all the considered cases.
Keywords :
geometry; micromechanical devices; oscillators; CC-beam; cantilever; capacitive MEMS oscillator resonant pull-in; excitation waveform; oscillator geometry; pulse-actuation; two-sided sinusoidal; Electrodes; Electrostatics; Microelectromechanical systems; Micromechanical devices; Oscillators; Periodic structures; Publishing; MEMS design; electrostatic actuation; nonlinear oscillators; resonant pull-in;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
