• DocumentCode
    618611
  • Title

    Reversible acoustical transducers in MEMS technology

  • Author

    Glacer, Christoph ; Dehe, A. ; Nawaz, Muhammad ; Laur, Rainer

  • Author_Institution
    Inst. for Electromagn. Theor. & Microelectron. (ITEM), Univ. of Bremen, Bremen, Germany
  • fYear
    2013
  • fDate
    16-18 April 2013
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Silicon microphones are already common in mobile applications and offer several advantages compared to conventional systems. In this paper a possibility is examined to use microphones also as electrostatically driven loudspeakers. The potential of these devices is demonstrated and the challenges to perform as speaker are discussed.
  • Keywords
    elemental semiconductors; micromechanical devices; microphones; silicon; MEMS technology; Si; electrostatically-driven loudspeakers; mobile applications; reversible acoustical transducers; silicon microphones; Acoustics; Electrodes; Electrostatics; Loudspeakers; Micromechanical devices; Microphones; Silicon; Acoustical transducer; MEMS loudspeaker; electrostatic driving;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
  • Conference_Location
    Barcelona
  • Print_ISBN
    978-1-4673-4477-7
  • Type

    conf

  • Filename
    6559396
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=618611