Title :
Reversible acoustical transducers in MEMS technology
Author :
Glacer, Christoph ; Dehe, A. ; Nawaz, Muhammad ; Laur, Rainer
Author_Institution :
Inst. for Electromagn. Theor. & Microelectron. (ITEM), Univ. of Bremen, Bremen, Germany
Abstract :
Silicon microphones are already common in mobile applications and offer several advantages compared to conventional systems. In this paper a possibility is examined to use microphones also as electrostatically driven loudspeakers. The potential of these devices is demonstrated and the challenges to perform as speaker are discussed.
Keywords :
elemental semiconductors; micromechanical devices; microphones; silicon; MEMS technology; Si; electrostatically-driven loudspeakers; mobile applications; reversible acoustical transducers; silicon microphones; Acoustics; Electrodes; Electrostatics; Loudspeakers; Micromechanical devices; Microphones; Silicon; Acoustical transducer; MEMS loudspeaker; electrostatic driving;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
