Title :
Lattice structure for a critically damped high-G MEMS accelerometer
Author :
Baldasarre, L. ; Tocchio, Alessandro ; Urquia, Mikel Azpeitia ; Zerbini, Sarah
Author_Institution :
Analog, MEMS & Sensor Group, STMicroelectron., Cornaredo, Italy
Abstract :
A novel design for high-G capacitive MEMS accelerometers that allows for a critically damped dynamical response is presented. The high damping condition is achieved by reducing the mass while keeping a high rigidity of the sensor through a lattice-like mechanical structure. Compared to previously proposed solutions, this design allows for smaller and more reliable sensors.
Keywords :
accelerometers; capacitive sensors; crystal structure; microsensors; critically damped dynamical response; high damping condition; high-G capacitive MEMS accelerometers; lattice structure; Accelerometers; Damping; Electrodes; Films; Micromechanical devices; Q-factor; Reliability; Automotive; MEMS; high-G accelerometer; squeeze film damping;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
