Title :
An analytic approach for the synthesis of RF MEMS capacitive switches
Author :
Bartolucci, G. ; de Angelis, G. ; Lucibello, Andrea ; Marcelli, Romolo ; Proietti, E.
Author_Institution :
IMM Roma, Rome, Italy
Abstract :
This paper is an extension of a previously published work concerning a novel approach for the design of RF MEMS switches in coplanar waveguide (CPW) configuration. The peculiarity of the method is to allow imposing the matching condition directly in analytic form. This result is obtained using the image parameter representation for the modeling of the device. Standard commercial simulators are used to develop a comparison among different switch configurations designed by means of the proposed modified approach. The numerical results confirm the validity of the method.
Keywords :
coplanar waveguides; microswitches; CPW configuration; RF MEMS capacitive switches; coplanar waveguide; image parameter representation; Bridge circuits; Coplanar waveguides; Impedance; Integrated circuit modeling; Micromechanical devices; Microswitches; Radio frequency;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7