Title :
A novel approach to RF MEMS device- and system-level simulation based on MEMS+ and Matlab-Simulink
Author :
Pagazani, Julien ; Mehdaoui, A. ; Lissorgues, Gaelle ; Schropfer, Gerold
Author_Institution :
ESIEE-Paris, Univ. Paris-Est, Noisy-le-Grand, France
Abstract :
The aim of this work is to model a novel tuneable RF capacitor based on a gyroscope-like complex geometry using a new design platform based on component library MEMS+. This modelling approach allows detailed and accurate device simulation as well as rapid system-level simulation through an automatic transfer into general system software, namely Matlab/Simulink.
Keywords :
capacitors; gyroscopes; micromechanical devices; Matlab-Simulink; RF MEMS device; automatic transfer; component library MEMS+; general system software; gyroscope-like complex geometry; system-level simulation; tuneable RF capacitor; Capacitors; Finite element analysis; Libraries; MATLAB; Mathematical model; Micromechanical devices; Radio frequency; MEMS modelling; RF MEMS; micro-fabrication; system level simulation; tunable capacitor;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
