Title :
MEMs tactile sensors for robots
Author_Institution :
Fac. of Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
Summary form only given. Micro-cantilevers and double-supported microbeams with piezo-resistors provide sensitive force measurement. The cantilevers/beams embedded in organic material like epoxy become tiny tactile sensors which measure not only normal force but also shear force. The fabrication process and the performance of the sensors are shown in this report. Finally, the sensor is applied to a robotic hand.
Keywords :
dexterous manipulators; force control; micromanipulators; microsensors; MEMS tactile sensor; double-supported microbeam; epoxy; force measurement; microcantilever; microelectromechanical system; normal force; organic material; piezoresistor; robotic hand; shear force; Abstracts; Educational institutions; Force; Micromechanical devices; Tactile sensors;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
