DocumentCode
618675
Title
MEMs tactile sensors for robots
Author
Shimoyama, Isao
Author_Institution
Fac. of Eng., Univ. of Tokyo, Tokyo, Japan
fYear
2013
fDate
16-18 April 2013
Firstpage
1
Lastpage
1
Abstract
Summary form only given. Micro-cantilevers and double-supported microbeams with piezo-resistors provide sensitive force measurement. The cantilevers/beams embedded in organic material like epoxy become tiny tactile sensors which measure not only normal force but also shear force. The fabrication process and the performance of the sensors are shown in this report. Finally, the sensor is applied to a robotic hand.
Keywords
dexterous manipulators; force control; micromanipulators; microsensors; MEMS tactile sensor; double-supported microbeam; epoxy; force measurement; microcantilever; microelectromechanical system; normal force; organic material; piezoresistor; robotic hand; shear force; Abstracts; Educational institutions; Force; Micromechanical devices; Tactile sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location
Barcelona
Print_ISBN
978-1-4673-4477-7
Type
conf
Filename
6559460
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