DocumentCode :
618681
Title :
Fabrication of metallic microchannel mold using X-ray LIGA for microfluidic applications
Author :
Phatthanakun, R. ; Yunphuttha, C. ; Pantong, C. ; Sriphung, C. ; Chomnawang, N. ; Viravathana, P.
Author_Institution :
Synchrotron Light Res. Inst., Nakhon Ratchasima, Thailand
fYear :
2013
fDate :
15-17 May 2013
Firstpage :
1
Lastpage :
5
Abstract :
Metallic microchannel mold for microfliudic applications is demonstrated based on X-ray LIGA technology. High aspect ratio microchannel made of SU-8 photoresist was constructed on a stainless substrate to create a mold template using X-ray lithography generated by synchrotron light source. Following X-ray lithography, the SU-8 mold template was filled with electroplated nickel to produce the required mold insert structure. To achieve a good bonding between the electroplated nickel and the stainless steel substrate, the electroplated surface was activated with sulfuric and Wood´s strike before nickel was electrodeposited. The over-electroplated structure was lapped and polished to obtain the final thickness. SU-8 mold template was finally removed and cleaned by plasma, resulting in the metallic microchannel mold for microchannel replication. A 10:1 mixture of pre-polymer PDMS was cast on to the metallic mold and peeled off to create the replicated PDMS microchannel. Replicated microchannel was attached on a glass substrate and injected with liquid to investigate the leakage problem. The proposed method can deliver the rapid replicated microchannel which is not complicated and simply applied for microfluidic applications.
Keywords :
LIGA; electroplating; light sources; microchannel flow; moulding; photoresists; replica techniques; stainless steel; synchrotrons; Ni; SU-8 mold template; SU-8 photoresist; Wood strike; X-ray LIGA technology; X-ray lithography; electroplated nickel; glass substrate; metallic microchannel mold; microchannel replication; microfluidic applications; over-electroplated structure; pre-polymer PDMS; replicated PDMS microchannel; stainless steel substrate; synchrotron light source; Microchannel; Microfluidics; Nickel; Resists; Steel; Substrates; Surface treatment; Microchannel; Microfluidic; Micromold; PDMS replication; Synchrotron light; X-ray LIGA;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON), 2013 10th International Conference on
Conference_Location :
Krabi
Print_ISBN :
978-1-4799-0546-1
Type :
conf
DOI :
10.1109/ECTICon.2013.6559467
Filename :
6559467
Link To Document :
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