• DocumentCode
    618936
  • Title

    A micromachined monolithic 3 axis accelerometer based on convection heat transfer

  • Author

    Leyue Jiang ; Yongyao Cai ; Haidong Liu ; Yang Zhao

  • Author_Institution
    MEMSIC Inc., Andover, MA, USA
  • fYear
    2013
  • fDate
    7-10 April 2013
  • Firstpage
    248
  • Lastpage
    251
  • Abstract
    In this paper, a monolithic 3 axis thermal accelerometer has been developed based on standard CMOS process. This 3 axis thermal accelerometer use exactly the same sensor area and manufacturing process as 2 axis thermal accelerometer reported in the past. It is easy to mass produce and has low cost, small size.
  • Keywords
    CMOS integrated circuits; accelerometers; convection; micromachining; Micromachined monolithic 3 axis thermal accelerometer; convection heat transfer; manufacturing process; sensor area; standard CMOS process; Acceleration; Accelerometers; Cavity resonators; Heating; Sensitivity; Temperature sensors; CMOS; monolithic; sensitivity; thermal accelerometer;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
  • Conference_Location
    Suzhou
  • Electronic_ISBN
    978-1-4673-6351-8
  • Type

    conf

  • DOI
    10.1109/NEMS.2013.6559725
  • Filename
    6559725
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=618936