Title :
Sliding mode control with adaptive feedforward compensator for ultra-precision active vibration isolation
Author :
Huayan Pu ; Wenchuan Jia ; Xuedong Chen
Author_Institution :
Sch. of Mechatron. Eng. & Autom., Shanghai Univ., Shanghai, China
Abstract :
Ultra-precision active vibration isolation system protects ultra-precision equipment from the transmission of external vibration, and suppresses vibration incurred by internal structures. In order to obtain the ideal skyhook effect, the sliding mode controller with adaptive feedforward compensator is proposed in this paper. With the controller, the vibration system can obtain the desire performance even when the system is under model uncertainties and significant direct disturbance. A series of simulations are carried out to verify the effectiveness of the controller.
Keywords :
feedforward; uncertain systems; variable structure systems; vibration isolation; adaptive feedforward compensator; direct disturbance; ideal skyhook effect; internal structures; model uncertainties; sliding mode controller; ultra-precision active vibration isolation system; ultra-precision equipment protection; vibration suppression; Adaptation models; Control systems; Decision support systems; Feedforward neural networks; Instruments; Intelligent structures; Vibrations; active vibration isolation; sliding mode control;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559740
