Title :
Freestanding Whispering-Gallery Mode microdisk resonator
Author :
Zheng Shi ; Shumin He ; Hongbo Zhu ; Miao Zhang ; Yongjin Wang
Abstract :
This article proposes a high-Q value Whispering-Gallery Mode (WGM) microdisk resonator, which is surrounded by photonic crystal with square lattice. Finite element method (FEM) is performed to model the microdisk resonator, and an ultrahigh quality factor (Q) value of 1.37×108 can be achieved at the wavelength of 1435.4nm. The proposed microdisk resonator is realized on a silicon-on-insulator (SOI) substrate. These structures of the device are defined by electron beam lithography, and then transferred into silicon layer by ion beam etching. The buried oxide layer is removed to generate freestanding photonic crystal and suspended microdisk.
Keywords :
Q-factor; electron beam lithography; elemental semiconductors; finite element analysis; micromechanical resonators; photonic crystals; silicon; silicon-on-insulator; sputter etching; FEM; SOI substrate; Si; buried oxide layer; electron beam lithography; finite element method; freestanding photonic crystal; freestanding whispering-gallery mode microdisk resonator; high-Q value WGM microdisk resonator; high-Q value whispering-gallery mode microdisk resonator; ion beam etching; microdisk resonator; silicon-on-insulator substrate; square lattice; suspended microdisk; ultrahigh quality factor value; wavelength 1435.4 nm; Finite element analysis; Gratings; Lattices; Optical resonators; Optical waveguides; Photonic crystals; Silicon; WGM mode; high Q value; microdisk resonator;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559752
