Freestanding Whispering-Gallery Mode microdisk resonator

Author

Zheng Shi ; Shumin He ; Hongbo Zhu ; Miao Zhang ; Yongjin Wang

fYear

2013

fDate

7-10 April 2013

Firstpage

364

Lastpage

367

Abstract

This article proposes a high-Q value Whispering-Gallery Mode (WGM) microdisk resonator, which is surrounded by photonic crystal with square lattice. Finite element method (FEM) is performed to model the microdisk resonator, and an ultrahigh quality factor (Q) value of 1.37×10⁸ can be achieved at the wavelength of 1435.4nm. The proposed microdisk resonator is realized on a silicon-on-insulator (SOI) substrate. These structures of the device are defined by electron beam lithography, and then transferred into silicon layer by ion beam etching. The buried oxide layer is removed to generate freestanding photonic crystal and suspended microdisk.

Keywords

Q-factor; electron beam lithography; elemental semiconductors; finite element analysis; micromechanical resonators; photonic crystals; silicon; silicon-on-insulator; sputter etching; FEM; SOI substrate; Si; buried oxide layer; electron beam lithography; finite element method; freestanding photonic crystal; freestanding whispering-gallery mode microdisk resonator; high-Q value WGM microdisk resonator; high-Q value whispering-gallery mode microdisk resonator; ion beam etching; microdisk resonator; silicon-on-insulator substrate; square lattice; suspended microdisk; ultrahigh quality factor value; wavelength 1435.4 nm; Finite element analysis; Gratings; Lattices; Optical resonators; Optical waveguides; Photonic crystals; Silicon; WGM mode; high Q value; microdisk resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559752

Filename

6559752