DocumentCode
618984
Title
Fabrication and characterization of surface-modified dry electrode for monitoring biopotential
Author
Yuanfang Chen ; Weihua Pei ; Sanyuan Chen ; Shanshan Zhao ; Huan Wang ; Qiang Gui ; Hongda Chen
Author_Institution
State Key Lab. of Integrated Optoelectron., Inst. of Semicond., Beijing, China
fYear
2013
fDate
7-10 April 2013
Firstpage
474
Lastpage
477
Abstract
The low and stable contact impedance between the dry electrode and skin interfaces is crucial for the acquisition of high quality biopotential signal, especially for long-term recording. Building upon this fact, poly(3,4-ethylenedioxythiophene) (PEDOT), was introduced onto the surface of dry electrode to increase the active contact area and reduce contact impedance. Silicon-based dry electrode (6 mm × 6 mm) with pyramid-like micro-needles was fabricated by a low cost method: dicing plus etching. The electrode-to-skin contact impedance (ESCI) measured on subjects proved that dry electrodes with PEDOT surface-modification have better electrical properties than that without PEDOT surface-modification. Besides, PEDOT modification combined with the microfabrication process can provide a rapid, cost-effective and high-yield method to manufacture dry electrode.
Keywords
bioMEMS; bioelectric potentials; biomedical electrodes; electric impedance; etching; microfabrication; needles; polymers; silicon; skin; surface treatment; PEDOT surface-modification; Si; contact impedance; electrical properties; electrode-to-skin contact impedance; etching; high quality biopotential signal; microfabrication; poly(3,4-ethylenedioxythiophene); pyramid-like micro-needles; silicon-based dry electrode; skin interfaces; stable contact impedance; surface-modified dry electrode; Coatings; Electrodes; Gold; Impedance; Skin; Surface impedance; Surface treatment; biopotential; dry electrode; modification; poly(3,4-ethylenedioxythiophene) (PEDOT);
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location
Suzhou
Electronic_ISBN
978-1-4673-6351-8
Type
conf
DOI
10.1109/NEMS.2013.6559773
Filename
6559773
Link To Document