Title :
Microelectroforming of a nickel nozzle plate featured with anti-stiction for a piezoelectric atomizer
Author :
Jheng-Jhih Huang ; Chin-Tai Chen
Author_Institution :
Mech. Eng., Nat. Kaohsiung Univ. of Appl. Sci., Kaohsiung, Taiwan
Abstract :
Micro atomizers have been popular over decades for many applications such as cooling, medical care and inkjet printing that were driven by reciprocal piezoelectric effect. The paper presents a simple but user-friendly design for the production of a piezoelectric atomizer utilizing a nickel nozzle plate with micro anti-stiction cavities on surface. Two PMMA substrates are specifically designed and bonded to carry out the capping, forming a micro atomizer in the study. Micro droplets (each volume ~ 36 pl) are able to be jetted out of the fluidic nozzles with a typical diameter of ~ 30 μm by driving the back piezoelectric plate. The thermal images of infrared thermograph into the spraying space are captured and analyzed for this cooling process.
Keywords :
cooling; drops; infrared imaging; microcavities; microfluidics; nickel; nozzles; piezoelectric devices; spraying; PMMA substrates; antistiction; capping; cooling process; fluidic nozzle; infrared thermograph; microanti-stiction cavities; microatomizer; microdroplet; microelectroforming; nickel nozzle plate; piezoelectric atomizer production; piezoelectric plate; reciprocal piezoelectric effect; spraying space; thermal image; user-friendly design; Biomedical imaging; Cooling; Decision support systems; Nickel; Piezoelectric effect; Printing; Production; anti-stiction; atomizer; microelectroforming;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559777
